Representative before the EPO

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Headquarter in Jena
Technology Company

Representative before the EPO

Technology company logo thumb
no operation time available
Headquarter in Oberkochen and 1 office
Technology Company

Utz Müller has worked on the following 1 EPO patent applications which have been published in the last five years:

EP12175894

Method for processing an object with miniaturized structures

IPC classification:
C23C 16/04, G03F 1/00, G03F 1/74, H01J 37/304, H01J 37/305
Applicant:
Carl Zeiss SMS GmbH
Applicant:
Carl Zeiss SMT GmbH
Agent:
Utz Müller, Carl Zeiss AG
Status:
EXAMINATION REQUESTED

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