Representative before the EPO

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Technology Company

Shiang-Lung Dung has worked on the following 7 EPO patent applications which have been published in the last five years:

EP12180596

Support table, lithographic apparatus and device manufacturing method

IPC classification:
G03F 7/20
Applicant:
ASML Netherlands B.V.
Agent:
Shiang-Lung Dung, ASML Netherlands B.V.
Status:
APPLICATION DEEMED TO BE WITHDRAWN
EP13723161

SUPPORT APPARATUS, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

IPC classification:
G03F 7/20
Applicant:
ASML Netherlands B.V.
Agent:
Shiang-Lung Dung, ASML Netherlands B.V.
Status:
GRANT OF PATENT INTENDED
EP13721703

OBJECT HOLDER AND LITHOGRAPHIC APPARATUS

IPC classification:
G03F 7/20
Applicant:
ASML Netherlands B.V.
Agent:
Shiang-Lung Dung, ASML Netherlands B.V.
Status:
GRANT OF PATENT INTENDED
EP14758149

SUPPORT TABLE FOR A LITHOGRAPHIC APPARATUS, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

IPC classification:
G03F 7/20
Applicant:
ASML Netherlands B.V.
Agent:
Shiang-Lung Dung, ASML Netherlands B.V.
Status:
EXAMINATION IN PROGRESS
EP15701322

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

IPC classification:
G03F 7/20
Applicant:
ASML Netherlands B.V.
Agent:
Shiang-Lung Dung, ASML Netherlands B.V.
Status:
EXAMINATION IN PROGRESS
EP15721224

LITHOGRAPHIC APPARATUS AND METHOD OF MANUFACTURING A LITHOGRAPHIC APPARATUS

IPC classification:
G03F 7/20
Applicant:
ASML Netherlands B.V.
Agent:
Shiang-Lung Dung, ASML Netherlands B.V.
Status:
EXAMINATION REQUESTED
EP15723888

LITHOGRAPHIC APPARATUS, METHOD OF TRANSFERRING A SUBSTRATE AND DEVICE MANUFACTURING METHOD

IPC classification:
G03F 7/20
Applicant:
ASML Netherlands B.V.
Agent:
Shiang-Lung Dung, ASML Netherlands B.V.
Status:
EXAMINATION REQUESTED

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