Representative before the EPO

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Technology Company

Petrus J. W. Slenders has worked on the following 13 EPO patent applications which have been published in the last five years:

EP12702451

GRAZING INCIDENCE REFLECTOR, LITHOGRAPHIC APPARATUS, METHOD FOR MANUFACTURING GRAZING INCIDENCE REFLECTOR AND METHOD FOR MANUFACTURING A DEVICE

IPC classification:
G02B 5/08, G03F 7/20, G21K 1/06
Applicant:
ASML Netherlands B.V.
Agent:
Petrus J. W. Slenders, ASML Netherlands B.V.
Status:
GRANT OF PATENT INTENDED
EP12725373

LITHOGRAPHIC PATTERNING PROCESS AND RESISTS TO USE THEREIN

IPC classification:
C08F 30/08, G03F 7/004, G03F 7/075
Applicant:
ASML Netherlands B.V.
Agent:
Petrus J. W. Slenders, ASML Netherlands B.V.
Status:
GRANT OF PATENT INTENDED
EP12766409

CHUCK, LITHOGRAPHY APPARATUS AND METHOD OF USING A CHUCK

IPC classification:
G03F 7/20
Applicant:
ASML Netherlands B.V.
Agent:
Petrus J. W. Slenders, ASML Netherlands B.V.
Status:
GRANT OF PATENT INTENDED
EP12702285

ELECTROSTATIC CLAMP, LITHOGRAPHIC APPARATUS, AND DEVICE MANUFACTURING METHOD

IPC classification:
G03F 7/20
Applicant:
ASML Netherlands B.V.
Agent:
Petrus J. W. Slenders, ASML Netherlands B.V.
Status:
NO OPPOSITION FILED WITHIN TIMELIMIT
EP13713438

PARTICULATE CONTAMINATION MEASUREMENT METHOD AND APPARATUS

IPC classification:
G03F 7/20
Applicant:
ASML Netherlands B.V.
Agent:
Petrus J. W. Slenders, ASML Netherlands B.V.
Status:
GRANT OF PATENT INTENDED
EP13702025

ELECTROSTATIC CLAMP

IPC classification:
G03F 7/00, H01L 21/683, H02N 13/00
Applicant:
ASML Netherlands B.V.
Agent:
Petrus J. W. Slenders, ASML Netherlands B.V.
Status:
PATENT GRANTED
EP13730902

ELECTROSTATIC CLAMP, LITHOGRAPHIC APPARATUS AND METHOD

IPC classification:
G03F 7/20, H01L 21/683
Applicant:
ASML Netherlands B.V.
Agent:
Petrus J. W. Slenders, ASML Netherlands B.V.
Status:
GRANT OF PATENT INTENDED
EP13770852

LITHOGRAPHIC METHOD AND APPARATUS

IPC classification:
G03F 7/20
Applicant:
ASML Netherlands B.V.
Agent:
Petrus J. W. Slenders, ASML Netherlands B.V.
Status:
GRANT OF PATENT INTENDED
EP13770854

ACTUATION MECHANISM, OPTICAL APPARATUS, LITHOGRAPHY APPARATUS AND METHOD OF MANUFACTURING DEVICES

IPC classification:
G02B 7/182, G02B 26/08, G03F 7/20
Applicant:
ASML Netherlands B.V.
Agent:
Petrus J. W. Slenders, ASML Netherlands B.V.
Status:
GRANT OF PATENT INTENDED
EP13799323

ELECTROSTATIC CLAMP

IPC classification:
G03F 7/20
Applicant:
ASML Netherlands B.V.
Agent:
Petrus J. W. Slenders, ASML Netherlands B.V.
Status:
GRANT OF PATENT INTENDED
EP14710572

SUPPORT STRUCTURE, METHOD OF CONTROLLING THE TEMPERATURE OF THE SAME, AND APPARATUSES INCLUDING THE SAME

IPC classification:
G03F 7/20, H01L 21/30
Applicant:
ASML Netherlands B.V.
Agent:
Petrus J. W. Slenders, ASML Netherlands B.V.
Status:
APPLICATION DEEMED TO BE WITHDRAWN
EP15712652

AN UNDULATOR

IPC classification:
F17C 3/08, F25D 19/00, G03F 7/20, H01F 1/055, H01F 6/04, H01F 7/02, H01S 3/09, H05H 7/04
Applicant:
ASML Netherlands B.V.
Agent:
Petrus J. W. Slenders, ASML Netherlands B.V.
Status:
EXAMINATION REQUESTED
EP15709638

APPARATUS FOR CLEANING AN OBJECT

IPC classification:
G03F 7/20
Applicant:
ASML Netherlands B.V.
Agent:
Petrus J. W. Slenders, ASML Netherlands B.V.
Status:
EXAMINATION REQUESTED

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