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We have observed 25 EP applications Petrus Henricus Johannes Broeken has served for within the last five+ years. (We consider all applications which have an EP A1 or A2 publication dated after September 24, 2013). Please note, that we only count EP applications, in which the name of the patent attorney is explicitly mentioned as representative. These EP applications are:

EP13724291

PHOTON SOURCE, METROLOGY APPARATUS, LITHOGRAPHIC SYSTEM AND DEVICE MANUFACTURING METHOD

IPC classification:
H05G 2/00, H05B 41/38, H01J 65/04, H01J 61/54, H01J 61/02, G03F 7/20, G01N 21/956
Applicant:
ASML Netherlands B.V.
Agent:
Petrus Henricus Johannes Broeken, ASML Netherlands B.V.
Status:
GRANT OF PATENT INTENDED
EP14748178

METHOD OF DESIGNING METROLOGY TARGETS, SUBSTRATES HAVING METROLOGY TARGETS, METHOD OF MEASURING OVERLAY, AND DEVICE MANUFACTURING METHOD

IPC classification:
G03F 7/20
Applicant:
ASML Netherlands B.V.
Agent:
Petrus Henricus Johannes Broeken, ASML Netherlands B.V.
Status:
EXAMINATION REQUESTED
EP15787614

METROLOGY METHOD, COMPUTER PRODUCT AND SYSTEM

IPC classification:
G03F 7/20
Applicant:
ASML Netherlands B.V.
Agent:
Petrus Henricus Johannes Broeken, ASML Netherlands B.V.
Status:
Request for examination was made
EP16181778

ILLUMINATION SOURCE FOR AN INSPECTION APPARATUS, INSPECTION APPARATUS AND INSPECTION METHOD

IPC classification:
G03F 7/20
Applicant:
ASML Netherlands B.V.
Agent:
Petrus Henricus Johannes Broeken, ASML Netherlands B.V.
Status:
The application has been published
EP16182256

DEVICE AND METHOD FOR PROCESSING A RADIATION BEAM WITH COHERENCE

IPC classification:
G02B 6/42, G03F 7/20
Applicant:
ASML Netherlands B.V.
Agent:
Petrus Henricus Johannes Broeken, ASML Netherlands B.V.
Status:
The application has been published
EP16188176

METROLOGY METHOD, APPARATUS AND COMPUTER PROGRAM

IPC classification:
G03F 7/20
Applicant:
ASML Netherlands B.V.
Agent:
Petrus Henricus Johannes Broeken, ASML Netherlands B.V.
Status:
The application has been published
EP16188816

ILLUMINATION SOURCE FOR AN INSPECTION APPARATUS, INSPECTION APPARATUS AND INSPECTION METHOD

IPC classification:
G03F 7/20, G01N 21/95
Applicant:
ASML Netherlands B.V.
Agent:
Petrus Henricus Johannes Broeken, ASML Netherlands B.V.
Status:
The application has been published
EP16190877

METROLOGY RECIPE SELECTION

IPC classification:
G03F 9/00, G03F 7/20
Applicant:
ASML Netherlands B.V.
Agent:
Petrus Henricus Johannes Broeken, ASML Netherlands B.V.
Status:
The application has been published
EP16193944

METHOD OF INSPECTING A SUBSTRATE, METROLOGY APPARATUS, AND LITHOGRAPHIC SYSTEM

IPC classification:
G01N 21/956, G01N 21/95, G01B 9/02, G03F 7/20
Applicant:
ASML Netherlands B.V.
Agent:
Petrus Henricus Johannes Broeken, ASML Netherlands B.V.
Status:
The application has been published
EP16197204

METHOD AND APPARATUS FOR MEASURING A PARAMETER OF A LITHOGRAPHIC PROCESS, COMPUTER PROGRAM PRODUCTS FOR IMPLEMENTING SUCH METHODS & APPARATUS

IPC classification:
G03F 7/20
Applicant:
ASML Netherlands B.V.
Agent:
Petrus Henricus Johannes Broeken, ASML Netherlands B.V.
Status:
The application has been published
EP16198346

ILLUMINATION SOURCE FOR AN INSPECTION APPARATUS, INSPECTION APPARATUS AND INSPECTION METHOD

IPC classification:
H01S 3/00, G01N 21/956, G02F 1/35, G03F 7/20
Applicant:
ASML Netherlands B.V.
Agent:
Petrus Henricus Johannes Broeken, ASML Netherlands B.V.
Status:
The application has been published
EP16198200

MEASUREMENT SYSTEM, LITHOGRAPHIC SYSTEM, AND METHOD OF MEASURING A TARGET

IPC classification:
G03F 9/00, G03F 7/20
Applicant:
ASML Netherlands B.V.
Agent:
Petrus Henricus Johannes Broeken, ASML Netherlands B.V.
Status:
The application has been published
EP16202927

METROLOGY APPARATUS

IPC classification:
G03F 7/20
Applicant:
ASML Netherlands B.V.
Agent:
Petrus Henricus Johannes Broeken, ASML Netherlands B.V.
Status:
The application has been published
EP16202508

METHOD OF MEASURING A TARGET, METROLOGY APPARATUS, POLARIZER ASSEMBLY

IPC classification:
G03F 7/20
Applicant:
ASML Netherlands B.V.
Agent:
Petrus Henricus Johannes Broeken, ASML Netherlands B.V.
Status:
The application has been published
EP16203208

METHODS AND APPARATUS FOR PREDICTING PERFORMANCE OF A MEASUREMENT METHOD, MEASUREMENT METHOD AND APPARATUS

IPC classification:
G03F 9/00, G01N 21/956, G01N 21/95, G03F 1/44, G01N 21/47, G03F 7/20
Applicant:
ASML Netherlands B.V.
Agent:
Petrus Henricus Johannes Broeken, ASML Netherlands B.V.
Status:
The application has been published
EP16204457

METHOD OF MEASURING A STRUCTURE, INSPECTION APPARATUS, LITHOGRAPHIC SYSTEM AND DEVICE MANUFACTURING METHOD

IPC classification:
G03F 7/20
Applicant:
ASML Netherlands B.V.
Agent:
Petrus Henricus Johannes Broeken, ASML Netherlands B.V.
Status:
The application has been published
EP16204662

METHOD FOR MONITORING A CHARACTERISTIC OF ILLUMINATION FROM A METROLOGY APPARATUS

IPC classification:
G01N 21/956, G03F 9/00, G03F 7/20
Applicant:
ASML Netherlands B.V.
Agent:
Petrus Henricus Johannes Broeken, ASML Netherlands B.V.
Status:
The application has been published
EP16204764

METHOD OF MEASURING A PROPERTY OF A SUBSTRATE, INSPECTION APPARATUS, LITHOGRAPHIC SYSTEM AND DEVICE MANUFACTURING METHOD

IPC classification:
G03F 7/20
Applicant:
ASML Netherlands B.V.
Agent:
Petrus Henricus Johannes Broeken, ASML Netherlands B.V.
Status:
The application has been published
EP17154425

METROLOGY METHOD, APPARATUS AND COMPUTER PROGRAM

IPC classification:
G01B 11/24, G03F 7/20
Applicant:
ASML Netherlands B.V.
Agent:
Petrus Henricus Johannes Broeken, ASML Netherlands B.V.
Status:
The application has been published
EP17155453

INSPECTION APPARATUS AND METHOD OF INSPECTING STRUCTURES

IPC classification:
G01N 21/956, G01N 21/47, G03F 9/00, G03F 7/20
Applicant:
ASML Netherlands B.V.
Agent:
Petrus Henricus Johannes Broeken, ASML Netherlands B.V.
Status:
The application has been published
EP17157671

METHODS OF ALIGNING A DIFFRACTIVE OPTICAL SYSTEM AND DIFFRACTIVE OPTICAL ELEMENT

IPC classification:
G11B 7/1353, G02B 5/18, G01B 11/00, G03F 7/20
Applicant:
ASML Netherlands B.V.
Agent:
Petrus Henricus Johannes Broeken, ASML Netherlands B.V.
Status:
The application has been published
EP17158923

METHODS AND APPARATUS FOR CALCULATING ELECTROMAGNETIC SCATTERING PROPERTIES OF A STRUCTURE AND FOR RECONSTRUCTION OF APPROXIMATE STRUCTURES

IPC classification:
G03F 7/20
Applicant:
ASML Netherlands B.V.
Agent:
Petrus Henricus Johannes Broeken, ASML Netherlands B.V.
Status:
The application has been published
EP17158942

RADIATION SOURCE

IPC classification:
G02F 1/35, H05G 2/00
Applicant:
ASML Netherlands B.V.
Agent:
Petrus Henricus Johannes Broeken, ASML Netherlands B.V.
Status:
The application has been published
EP17161515

STAGE SYSTEM AND METROLOGY TOOL

IPC classification:
G03F 7/20
Applicant:
ASML Netherlands B.V.
Agent:
Petrus Henricus Johannes Broeken, ASML Netherlands B.V.
Status:
The application has been published
EP17160996

APPARATUS FOR DELIVERING GAS

IPC classification:
H01S 3/00, G02F 1/35, G01N 21/956, G03F 1/84, G03F 7/20
Applicant:
ASML Netherlands B.V.
Agent:
Petrus Henricus Johannes Broeken, ASML Netherlands B.V.
Status:
The application has been published

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