Representative before the EPO

Company dna lam research ag
no operation time available
1 office
active in Legal Services

Representative before the EPO

Company dna patentanwalt gerhard kontrus
no operation time available
1 office
active in Legal Services

Representative before the EPO

Company dna sez ag
no operation time available
94.84
2 offices
active in Legal Services

Gerhard Kontrus has worked on the following 10 EPO patent applications which have been published in the last five years:

EP15189588

SYSTEM AND METHOD FOR DETECTING A PROCESS POINT IN MULTI-MODE PULSE PROCESSES

IPC classification:
H01J 37/32
Agent:
Gerhard Kontrus, Lam Research AG
Status:
EXAMINATION IN PROGRESS
EP15199363

SELECTIVE NITRIDE ETCH

IPC classification:
H01L 21/311
Agent:
Gerhard Kontrus, Lam Research AG
Status:
APPLICATION PUBLISHED
EP15200663

ISOTROPIC ATOMIC LAYER ETCH FOR SILICON AND GERMANIUM OXIDES

IPC classification:
H01L 21/311
Agent:
Gerhard Kontrus, Lam Research AG
Status:
APPLICATION PUBLISHED
EP16152692

ESTIMATION OF LIFETIME REMAINING FOR A CONSUMABLE-PART IN A SEMICONDUCTOR MANUFACTURING CHAMBER

IPC classification:
H01J 37/32
Agent:
Gerhard Kontrus, Lam Research AG
Status:
APPLICATION PUBLISHED
EP12152003

Multiple frequency plasma etch reactor

IPC classification:
H01J 37/32
Agent:
Gerhard Kontrus, Lam Research AG
Status:
NO OPPOSITION FILED WITHIN TIMELIMIT
EP16165058

LONG LIFETIME THERMAL SPRAY COATING FOR ETCHING OR DEPOSITION CHAMBER APPLICATION

IPC classification:
C23C 16/44, H01J 37/32
Agent:
Gerhard Kontrus, Lam Research AG
Status:
EXAMINATION REQUESTED
EP16183167

EDGE RING ASSEMBLY FOR IMPROVING FEATURE PROFILE TILTING AT EXTREME EDGE OF WAFER

IPC classification:
H01J 37/32
Agent:
Gerhard Kontrus, Lam Research AG
Status:
Request for examination was made
EP16202351

SEALED ELASTOMER BONDED SI ELECTRODES AND THE LIKE FOR REDUCED PARTICLE CONTAMINATION IN DIELECTRIC ETCH

IPC classification:
H01J 37/32, H01L 21/302, H01L 21/461
Agent:
Gerhard Kontrus, Lam Research AG
Status:
APPLICATION PUBLISHED
EP15851416

GAS SUPPLY DELIVERY ARRANGEMENT INCLUDING A GAS SPLITTER FOR TUNABLE GAS FLOW CONTROL

IPC classification:
H01L 21/205
Agent:
Gerhard Kontrus, Lam Research AG
Status:
Request for examination was made
EP17162738

SUBSTRATE PROCESSING SYSTEM INCLUDING A COIL WITH AN RF POWERED FARADAY SHIELD

IPC classification:
H01J 37/32
Agent:
Gerhard Kontrus, Lam Research AG
Status:
The application has been published

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