Representative before the EPO

Technology company logo thumb
no operation time available
1 office
Technology Company

François-Xavier Grout de Beaufort has worked on the following 52 EPO patent applications which have been published in the last five years:

EP11305844

Deposition of gallium containing thin films using new gallium precursors.

IPC classification:
C07F 5/00, C23C 16/00
Applicant:
Air Liquide S.A.
Agent:
François-Xavier Grout de Beaufort, Air Liquide S.A.
Status:
APPLICATION DEEMED TO BE WITHDRAWN
EP11305846

Deposition of indium containing thin films using new indium precursors

IPC classification:
C07F 5/00, C23C 16/00
Applicant:
Air Liquide S.A.
Agent:
François-Xavier Grout de Beaufort, Air Liquide S.A.
Status:
APPLICATION DEEMED TO BE WITHDRAWN
EP11306191

Novel niobium-organic compounds and their use for thin films deposition

IPC classification:
C07F 9/00, C23C 16/18
Applicant:
Air Liquide S.A.
Agent:
François-Xavier Grout de Beaufort, Air Liquide S.A.
Status:
APPLICATION DEEMED TO BE WITHDRAWN
EP11306196

Niobium-organic compounds and their use for thin films deposition

IPC classification:
C07F 9/00, C23C 16/18
Applicant:
Air Liquide S.A.
Agent:
François-Xavier Grout de Beaufort, Air Liquide S.A.
Status:
APPLICATION DEEMED TO BE WITHDRAWN
EP11306197

Vanadium-organic compounds and their use for thin films deposition

IPC classification:
C07F 9/00, C23C 16/18
Applicant:
Air Liquide S.A.
Agent:
François-Xavier Grout de Beaufort, Air Liquide S.A.
Status:
APPLICATION DEEMED TO BE WITHDRAWN
EP11306190

Novel tantalum-organic compounds and their use for thin films deposition

IPC classification:
C07F 9/00
Applicant:
Air Liquide S.A.
Agent:
François-Xavier Grout de Beaufort, Air Liquide S.A.
Status:
APPLICATION DEEMED TO BE WITHDRAWN
EP11306192

Novel vanadium-organic compounds and their use for thin films deposition

IPC classification:
C07F 9/00, C23C 16/18
Applicant:
Air Liquide S.A.
Agent:
François-Xavier Grout de Beaufort, Air Liquide S.A.
Status:
APPLICATION DEEMED TO BE WITHDRAWN
EP11306193

TANTALUM-ORGANIC COMPOUNDS AND THEIR USE FOR THIN FILMS DEPOSITION

IPC classification:
C07F 9/00, C23C 16/18
Applicant:
Air Liquide S.A.
Agent:
François-Xavier Grout de Beaufort, Air Liquide S.A.
Status:
APPLICATION DEEMED TO BE WITHDRAWN
EP14154472

Method for deposition of silicon nitride layers

IPC classification:
C23C 16/34, C23C 16/36, C23C 16/44, C23C 16/448, C23C 16/455, H01L 21/205
Applicant:
Air Liquide S.A.
Agent:
François-Xavier Grout de Beaufort, Air Liquide S.A.
Status:
APPLICATION DEEMED TO BE WITHDRAWN
EP12306522

Microcrystalline silicon thin film PECVD using hydrogen and silanes mixtures

IPC classification:
C23C 16/24, C23C 16/509, H01L 21/02, H01L 31/18
Applicant:
Air Liquide S.A.
Agent:
François-Xavier Grout de Beaufort, Air Liquide S.A.
Status:
APPLICATION DEEMED TO BE WITHDRAWN
EP12306124

Pentadienyl barium-organic compounds and their use for thin films deposition

IPC classification:
C07F 3/00, C23C 16/00
Applicant:
Air Liquide S.A.
Agent:
François-Xavier Grout de Beaufort, Air Liquide S.A.
Status:
APPLICATION DEEMED TO BE WITHDRAWN
EP12306119

Salen-type strontium precursors for vapor phase deposition of thin films

IPC classification:
C07F 3/00, C23C 16/00
Applicant:
Air Liquide S.A.
Agent:
François-Xavier Grout de Beaufort, Air Liquide S.A.
Status:
APPLICATION DEEMED TO BE WITHDRAWN
EP12306125

Pentadienyl strontium-organic compounds and their use for thin films deposition

IPC classification:
C07F 3/00, C23C 16/00
Applicant:
Air Liquide S.A.
Agent:
François-Xavier Grout de Beaufort, Air Liquide S.A.
Status:
APPLICATION DEEMED TO BE WITHDRAWN
EP13305704

Method for forming a tantalum-containing layer on a substrate

IPC classification:
C07F 9/00, C23C 16/18, C23C 16/455
Applicant:
Air Liquide S.A.
Agent:
François-Xavier Grout de Beaufort, Air Liquide S.A.
Status:
APPLICATION DEEMED TO BE WITHDRAWN
EP13305719

Vanadium precursors and their use

IPC classification:
C07F 9/00, C23C 16/40, C23C 16/455
Applicant:
Air Liquide S.A.
Agent:
François-Xavier Grout de Beaufort, Air Liquide S.A.
Status:
APPLICATION DEEMED TO BE WITHDRAWN
EP13305718

Method for forming a vanadium-containing layer on a substrate

IPC classification:
C07F 9/00, C23C 16/40, C23C 16/455
Applicant:
Air Liquide S.A.
Agent:
François-Xavier Grout de Beaufort, Air Liquide S.A.
Status:
APPLICATION DEEMED TO BE WITHDRAWN
EP13305720

New Vanadium precursors and their use

IPC classification:
C07F 9/00, C23C 16/40, C23C 16/455
Applicant:
Air Liquide S.A.
Agent:
François-Xavier Grout de Beaufort, Air Liquide S.A.
Status:
APPLICATION DEEMED TO BE WITHDRAWN
EP13305706

New tantalum precursors and their use

IPC classification:
C07F 9/00, C23C 16/18, C23C 16/455
Applicant:
Air Liquide S.A.
Agent:
François-Xavier Grout de Beaufort, Air Liquide S.A.
Status:
APPLICATION DEEMED TO BE WITHDRAWN
EP13305705

Tantalum precursors and their use

IPC classification:
C07F 9/00, C23C 16/18, C23C 16/455
Applicant:
Air Liquide S.A.
Agent:
François-Xavier Grout de Beaufort, Air Liquide S.A.
Status:
APPLICATION DEEMED TO BE WITHDRAWN
EP12306118

Salen-type barium precursors for vapor phase deposition of thin films

IPC classification:
C07F 3/00, C23C 16/18, C23C 16/40
Applicant:
Air Liquide S.A.
Agent:
François-Xavier Grout de Beaufort, Air Liquide S.A.
Status:
NO OPPOSITION FILED WITHIN TIMELIMIT
EP14165141

Hafnium- and zirconium-containing precursors and methods of using the same

IPC classification:
C07F 7/00, C23C 16/18, C23C 16/30
Applicant:
Air Liquide S.A.
Agent:
François-Xavier Grout de Beaufort, Air Liquide S.A.
Status:
APPLICATION DEEMED TO BE WITHDRAWN
EP13305745

Niobium-complexes and their use in a method for forming a niobium-containing layer on a substrate

IPC classification:
C07F 9/00, H01L 21/00, H01L 27/00
Applicant:
Air Liquide S.A.
Agent:
François-Xavier Grout de Beaufort, Air Liquide S.A.
Status:
APPLICATION DEEMED TO BE WITHDRAWN
EP13305748

Niobium-complexes and their use in a method for forming a niobium-containing layer on a substrate

IPC classification:
C07F 9/00, H01L 21/00, H01L 27/00
Applicant:
Air Liquide S.A.
Agent:
François-Xavier Grout de Beaufort, Air Liquide S.A.
Status:
APPLICATION DEEMED TO BE WITHDRAWN
EP13305747

Niobium precursors and their use

IPC classification:
C07F 9/00, H01L 21/00, H01L 27/00
Applicant:
Air Liquide S.A.
Agent:
François-Xavier Grout de Beaufort, Air Liquide S.A.
Status:
APPLICATION DEEMED TO BE WITHDRAWN
EP13747156

LIQUID PHASE SYNTHESIS OF TRISILYLAMINE

IPC classification:
B01J 19/18, C01B 21/068
Applicant:
Air Liquide S.A.
Agent:
François-Xavier Grout de Beaufort, Air Liquide S.A.
Status:
APPLICATION DEEMED TO BE WITHDRAWN
EP13306591

Norbornadiene purification method

IPC classification:
C07C 7/12, C07C 7/20, C07C 13/39, C23C 16/40
Applicant:
Air Liquide S.A.
Agent:
François-Xavier Grout de Beaufort, Air Liquide S.A.
Status:
GRANT OF PATENT INTENDED
EP13306592

Extractive distillation in a norbornadiene purification method

IPC classification:
C07C 7/00, C07C 7/08, C07C 7/20, C07C 13/39
Applicant:
Air Liquide S.A.
Agent:
François-Xavier Grout de Beaufort, Air Liquide S.A.
Status:
PATENT GRANTED
EP13819216

ORGANOSILANE PRECURSORS FOR ALD/CVD SILICON-CONTAINING FILM APPLICATIONS

IPC classification:
C23C 16/24, C23C 16/448
Applicant:
Air Liquide S.A.
Agent:
François-Xavier Grout de Beaufort, Air Liquide S.A.
Status:
GRANT OF PATENT INTENDED
EP14305117

Tantalum organic precursors and their use for vapor phase deposition of tantalum containing films

IPC classification:
C07F 9/00, C23C 16/455, H01L 21/285
Applicant:
Air Liquide S.A.
Agent:
François-Xavier Grout de Beaufort, Air Liquide S.A.
Status:
GRANT OF PATENT INTENDED
EP14305139

Novel dithiocarbamate niobium organic precursors and their use for vapor phase deposition of niobium containing films

IPC classification:
C07F 9/00, H01L 21/00, H01L 27/00
Applicant:
Air Liquide S.A.
Agent:
François-Xavier Grout de Beaufort, Air Liquide S.A.
Status:
APPLICATION DEEMED TO BE WITHDRAWN
EP14305114

Vanadium organic precursors and their use for vapor phase deposition of vanadium containing films

IPC classification:
C07F 9/00, C23C 16/455, H01L 21/285
Applicant:
Air Liquide S.A.
Agent:
François-Xavier Grout de Beaufort, Air Liquide S.A.
Status:
APPLICATION DEEMED TO BE WITHDRAWN
EP14305118

Novel dithiocarbamate tantalum organic precursors and their use for vapor phase deposition of tantalum containing films

IPC classification:
C07F 9/00, C23C 16/455, H01L 21/285
Applicant:
Air Liquide S.A.
Agent:
François-Xavier Grout de Beaufort, Air Liquide S.A.
Status:
APPLICATION DEEMED TO BE WITHDRAWN
EP14305113

Novel dithiocarbamate vanadium organic precursors and their use for vapor phase deposition of vanadium containing films

IPC classification:
C07F 9/00, C23C 16/455, H01L 21/285
Applicant:
Air Liquide S.A.
Agent:
François-Xavier Grout de Beaufort, Air Liquide S.A.
Status:
APPLICATION DEEMED TO BE WITHDRAWN
EP14305140

Niobium organic precursors and their use for vapor phase deposition of niobium containing films

IPC classification:
C07F 9/00, H01L 21/00, H01L 27/00
Applicant:
Air Liquide S.A.
Agent:
François-Xavier Grout de Beaufort, Air Liquide S.A.
Status:
APPLICATION DEEMED TO BE WITHDRAWN
EP11750264

CLEANING SOLVENT AND CLEANING METHOD FOR METALLIC COMPOUND

IPC classification:
C11D 7/50, C23C 16/44, H01L 21/205, H01L 21/304
Applicant:
Air Liquide S.A.
Agent:
François-Xavier Grout de Beaufort, Air Liquide S.A.
Status:
APPLICATION DEEMED TO BE WITHDRAWN
EP13786691

DIETARY COMPOSITIONS COMPRISING CAPSULES OBTAINED BY COACERVATION WITHOUT THE USE OF TOXIC CROSS-LINKING AGENTS

IPC classification:
A23L 1/00, A23L 1/22
Applicant:
Societe d'Exploitation de Produits pour les Industries Chimiques (Seppic)
Agent:
François-Xavier Grout de Beaufort, Air Liquide S.A.
Status:
GRANT OF PATENT INTENDED
EP13786689

COACERVATION ENCAPSULATION METHOD THAT DOES NOT INVOLVE THE USE OF TOXIC CROSS-LINKING AGENTS

IPC classification:
A23P 1/04, A61K 8/11, A61K 9/50, B01J 13/10, B01J 13/22, C09B 67/02, C11D 3/50
Agent:
François-Xavier Grout de Beaufort, Air Liquide S.A.
Status:
GRANT OF PATENT INTENDED
EP14305572

Use of silicon and carbon precursors for producing fiber-reinforced composites

IPC classification:
C23C 16/04, C23C 16/32
Applicant:
Air Liquide S.A.
Agent:
François-Xavier Grout de Beaufort, Air Liquide S.A.
Status:
EXAMINATION IN PROGRESS
EP11750278

ADSORBENT FOR REMOVING METAL COMPOUNDS AND METHOD FOR SAME

IPC classification:
C07F 3/06
Applicant:
Air Liquide S.A.
Agent:
François-Xavier Grout de Beaufort, Air Liquide S.A.
Status:
APPLICATION DEEMED TO BE WITHDRAWN
EP14305829

Usage of Si-O-Si based molecules for high efficiency Si solar cells

IPC classification:
H01L 21/02
Applicant:
Air Liquide S.A.
Applicant:
Centre National de la Recherche Scientifique (CNRS)
Applicant:
Ecole Polytechnique
Agent:
François-Xavier Grout de Beaufort, Air Liquide S.A.
Status:
EXAMINATION REQUESTED
EP14305831

Usage of TMDSO for depositing a silicon dioxide layer on a substrate.

IPC classification:
H01L 21/02
Applicant:
Air Liquide S.A.
Applicant:
Centre National de la Recherche Scientifique (CNRS)
Applicant:
Ecole Polytechnique
Agent:
François-Xavier Grout de Beaufort, Air Liquide S.A.
Status:
EXAMINATION REQUESTED
EP14305830

Usage of Si-O-Si based molecules for depositing an amorphous silicon oxide layer on a substrate

IPC classification:
H01L 21/02
Applicant:
Air Liquide S.A.
Applicant:
Centre National de la Recherche Scientifique (CNRS)
Applicant:
Ecole Polytechnique
Agent:
François-Xavier Grout de Beaufort, Air Liquide S.A.
Status:
EXAMINATION REQUESTED
EP11771667

RUTHENIUM-CONTAINING PRECURSORS FOR CVD AND ALD

IPC classification:
C23C 16/16, C23C 16/18, C23C 16/30, C23C 16/40, H01L 21/285
Applicant:
Air Liquide S.A.
Agent:
François-Xavier Grout de Beaufort, Air Liquide S.A.
Status:
APPLICATION DEEMED TO BE WITHDRAWN
EP12185967

METHOD OF FORMING HIGH-K DIELECTRIC FILMS BASED ON NOVEL ZIRCONIUM, AND HAFNIUM PRECURSORS AND THEIR USE FOR SEMICONDUCTOR MANUFACTURING

IPC classification:
C07F 7/00, C07F 17/00, C23C 16/18, C23C 16/30, C23C 16/34, C23C 16/40, H01L 21/314, H01L 21/316
Applicant:
Air Liquide S.A.
Agent:
François-Xavier Grout de Beaufort, Air Liquide S.A.
Status:
NO OPPOSITION FILED WITHIN TIMELIMIT
EP14849790

AMINE SUBSTITUTED TRISILYLAMINE AND TRIDISILYLAMINE COMPOUNDS

IPC classification:
C09K 3/18
Agent:
François-Xavier Grout de Beaufort, Air Liquide S.A.
Status:
GRANT OF PATENT INTENDED
EP14815402

ADJUVANTED VACCINES FOR IN OVO AVIAN VACCINATION

IPC classification:
A61K 39/00, A61K 39/39
Agent:
François-Xavier Grout de Beaufort, Air Liquide S.A.
Status:
EXAMINATION IN PROGRESS
EP15306246

METHOD FOR MANUFACTURING GERMANIUM BASED THIN FILM SOLAR CELLS WITH IMPROVED LIGHT INDUCED DEGRADATION PROPERTIES

IPC classification:
H01L 31/0376, H01L 31/075, H01L 31/076, H01L 31/20
Applicant:
Air Liquide S.A.
Agent:
François-Xavier Grout de Beaufort, Air Liquide S.A.
Status:
APPLICATION PUBLISHED
EP15306245

METHOD FOR MANUFACTURING SILICON BASED THIN FILM SOLAR CELLS WITH IMPROVED LIGHT INDUCED DEGRADATION PROPERTIES

IPC classification:
H01L 31/0376, H01L 31/075, H01L 31/076, H01L 31/20
Applicant:
Air Liquide S.A.
Agent:
François-Xavier Grout de Beaufort, Air Liquide S.A.
Status:
APPLICATION PUBLISHED
EP15723273

CO-GRANULES OF XANTHAN GUM AND ACACIA GUM

IPC classification:
A61K 9/16, A61K 9/20
Agent:
François-Xavier Grout de Beaufort, Air Liquide S.A.
Status:
EXAMINATION REQUESTED
EP15771186

ORAL ADMINISTRATION OF AT LEAST ONE PHARMACEUTICAL AND/OR ANTIGENIC ACTIVE SUBSTANCE

IPC classification:
A61K 47/32, A61K 47/34
Agent:
François-Xavier Grout de Beaufort, Air Liquide S.A.
Status:
Request for examination was made

Please Sign in to use this feature