Representative before the EPO

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Diana Filip has worked on the following 2 EPO patent applications which have been published in the last five years:

EP15720652

METHOD FOR COMPENSATING AN EXPOSURE ERROR IN AN EXPOSURE PROCESS

IPC classification:
G03F 7/20
Applicant:
ASML Netherlands B.V.
Agent:
Diana Filip, ASML Netherlands B.V.
Status:
EXAMINATION REQUESTED
EP15736224

MEMBRANES FOR USE WITHIN A LITHOGRAPHIC APPARATUS AND A LITHOGRAPHIC APPARATUS COMPRISING SUCH A MEMBRANE

IPC classification:
G02B 5/08, G02B 5/20, G03F 1/00, G03F 1/62, G03F 7/20
Applicant:
ASML Netherlands B.V.
Agent:
Diana Filip, ASML Netherlands B.V.
Status:
EXAMINATION REQUESTED

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