DENSE LINE EXTREME ULTRAVIOLET LITHOGRAPHY SYSTEM WITH DISTORTION MATCHING
- Application ID: EP17815964
- Status: █ Request for examination was made
This EP application has the IPC class G03 (PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY). Hoffmann Eitle PartmbB is specialized in G03. Here you find a list of all patent agent firms which are specialized in this IPC class. For a similar patent, they might be a good choice.
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