Priority Date: 20.06.16 (US 201662352545P)

DENSE LINE EXTREME ULTRAVIOLET LITHOGRAPHY SYSTEM WITH DISTORTION MATCHING

  • Application ID: EP17815964
  • Status: Request for examination was made

Attorney

Employment test 51 - 200 employees
Company dna hoffmann eitle
operating since 1892
Headquarter in Munich and 6 offices
active in Legal Services and IP Portfolio Processing

Specialization

This EP application has the IPC class G03 (PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY). Hoffmann Eitle PartmbB is specialized in G03. Here you find a list of all patent agent firms which are specialized in this IPC class. For a similar patent, they might be a good choice.

Timeline

  • 20.06.2016 - Priority Date (US 201662352545P)
  • 28.12.2017 - Publication A1 (WO2017222919)
  • 24.04.2019 - Publication A1 (EP3472672)

IPC Classification