METHOD FOR PROJECTING A BEAM OF PARTICLES ONTO A SUBSTRATE WITH CORRECTION OF SCATTERING EFFECTS
- Application ID: EP17729836
- Status: █ Request for examination was made
This EP application has the IPC combination G03, G06, and H01. We found, that Klunker Schmitt-Nilson Hirsch Patentanwälte (KSNH) Klunker IP Patentanwälte PartG mbB, Bird Goën & Co NV, Weser & Kollegen, Osha Liang SARL are specialized in this combination either. For a similar patent, they might be a good choice.