Priority Date: 17.09.07 (US 20070898836)

DEBRIS REMOVAL FROM A TRENCH FORMED ON A PHOTOLITHOGRAPHIC MASK

  • Application ID: EP16178942
  • Status: Request for examination was made

Attorney

operating since 1987
Headquarter in Munich and 3 offices
active in Legal Services

Specialization

This EP application has the IPC combination B03, B08, G03, and H01. There is no patent agent firm in the market, which is specialized in this combination of IPC classes.

Timeline

  • 17.09.2007 - Priority Date (US 20070898836)
  • 29.03.2017 - Publication A1 (EP3147937)