Synthesis of precursors for ALD of tellurium and selenium thin films
- Application ID: EP15150242
- Status: █ EXAMINATION REQUESTED
This EP application has the IPC class C07, C23, and H01. We found, that Kailuweit & Uhlemann, Bird Goën & Co NV, Gille Habral, Patentanwälte Gierlich & Pischitzis Partnerschaft, Forrester & Boehmert are specialized in this combination either. For a similar patent, they might be a good choice.