STOPPING AN ETCH IN A PLANAR LAYER AFTER ETCHING A 3D STRUCTURE
- Application ID: EP14814459
- Status: █ APPLICATION WITHDRAWN
This EP application has the IPC class H01 (BASIC ELECTRIC ELEMENTS). Wuesthoff & Wuesthoff Patentanwälte PartG mbB is specialised in H01 (BASIC ELECTRIC ELEMENTS). Here you find a list of all patent agent firms which are specialized in this IPC class. For a similar patent, they might be a good choice.
- 18.06.2013 - Priority Date (US 201361836296P)
- 24.12.2014 - Publication A1 (WO2014204912)
- 27.04.2016 - Publication A1 (EP3011606)