Priority Date: 18.06.13 (US 201361836296P)

STOPPING AN ETCH IN A PLANAR LAYER AFTER ETCHING A 3D STRUCTURE

  • Application ID: EP14814459
  • Status: APPLICATION WITHDRAWN

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Specialization

This EP application has the IPC class H01 (BASIC ELECTRIC ELEMENTS). Wuesthoff & Wuesthoff Patentanwälte PartG mbB is specialised in H01 (BASIC ELECTRIC ELEMENTS). Here you find a list of all patent agent firms which are specialized in this IPC class. For a similar patent, they might be a good choice.

Timeline

  • 18.06.2013 - Priority Date (US 201361836296P)
  • 24.12.2014 - Publication A1 (WO2014204912)
  • 27.04.2016 - Publication A1 (EP3011606)

IPC Classification