Apparatus for processing a semiconductor workpiece
- Application ID: EP14275128
- Status: █ GRANT OF PATENT INTENDED
This EP application has the IPC class C23 (COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL) and H01 (BASIC ELECTRIC ELEMENTS). Wynne-Jones Lainé & James LLP is specialized in the combination C23 and H01. We found, that Kailuweit & Uhlemann, Bird Goën & Co NV, Troesch Scheidegger Werner AG, adares Reininger & Partner, Kanzlei Kempkens and 22 others are specialized in all of these IPC classes as well. For a similar patent, they might be a good choice.