Priority Date: 08.11.13 (DE 20131018773)

Lithography exposure device for lithographic exposure with single or multi-level laser project units with one or more wavelengths

  • Application ID: EP14192305
  • Status: APPLICATION DEEMED TO BE WITHDRAWN

Attorney

Employment test 51 - 200 employees
Company dna vossius and partner
operating since 1961
Headquarter in Munich and 3 offices
active in Legal Services and IP-related Communication Service

Specialization

This EP application has the IPC class G03 (PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY). Here you find a list of all patent agent firms which are specialized in this IPC class. For a similar patent, they might be a good choice.

Timeline

  • 08.11.2013 - Priority Date (DE 20131018773)
  • 13.05.2015 - Publication A2 (EP2871525)
  • 23.09.2015 - Publication A3 (EP2871525)

IPC Classification