Priority Date: 13.11.13 (JP 20130234900)

Focused ion beam system and method of making focal adjustment of ion beam

  • Application ID: EP14191939
  • Status: PATENT GRANTED

Applicant

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Specialization

This patent has the IPC class H01 (BASIC ELECTRIC ELEMENTS) is specialized in H01. Here you find a list of all patent agent firms which are specialized in this IPC class. For a similar patent, they might be a good choice.

Timeline

  • 13.11.2013 - Priority Date (JP 20130234900)
  • 20.05.2015 - Publication A1 (EP2874176)
  • 06.07.2016 - Publication B1 (EP2874176)

IPC Classification