Immersion exposure apparatus, immersion exposure method, and device fabricating method
- Application ID: EP14191452
- Status: █ NO OPPOSITION FILED WITHIN TIMELIMIT
This EP application has the IPC class G03 (PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY). Hoffmann Eitle PartmbB is specialized in G03. Here you find a list of all patent agent firms which are specialized in this IPC class. For a similar patent, they might be a good choice.
- 19.01.2006 - Priority Date (JP 20060011506)
- 08.04.2015 - Publication A1 (EP2857902)
- 20.04.2016 - Publication B1 (EP2857902)