Priority Date: 11.10.13 (EP 20130188352)

Substrate plate for MEMS devices

  • Application ID: EP14188211
  • Status: EXAMINATION IN PROGRESS

Applicant

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Specialization

This EP application has the IPC class B81 (MICRO-STRUCTURAL TECHNOLOGY). Here you find a list of all patent agent firms which are specialized in this IPC class. For a similar patent, they might be a good choice.

Timeline

  • 11.10.2013 - Priority Date (EP 20130188352)
  • 15.04.2015 - Publication A1 (EP2860150)

IPC Classification