Priority Date: 11.10.13 (JP 20130213489)

Substrate processing apparatus and substrate processing method

  • Application ID: EP14188160
  • Status: PATENT GRANTED

Applicant

Technology company logo small
Technology Company

Attorney

no operation time available
Headquarter in Munich
active in Legal Services

Specialization

This EP application has the IPC class B24 (GRINDING; POLISHING). Here you find a list of all patent agent firms which are specialized in this IPC class. For a similar patent, they might be a good choice.

Timeline

  • 11.10.2013 - Priority Date (JP 20130213489)
  • 15.04.2015 - Publication A1 (EP2859993)
  • 31.08.2016 - Publication B1 (EP2859993)