All-silicon electrode capacitive transducer on a glass substrate
- Application ID: EP14187542
- Status: █ GRANT OF PATENT INTENDED
This EP application has the IPC class B81 (MICRO-STRUCTURAL TECHNOLOGY). Patent Outsourcing Limited is specialised in B81 (MICRO-STRUCTURAL TECHNOLOGY). Here you find a list of all patent agent firms which are specialized in this IPC class. For a similar patent, they might be a good choice.
- 29.10.2013 - Priority Date (US 201314066168)
- 06.05.2015 - Publication A1 (EP2868623)