Exposure method, exposure apparatus, and methods for producing a device
- Application ID: EP14179112
- Status: █ GRANT OF PATENT INTENDED
This EP application has the IPC class G03 (PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY). Hoffmann Eitle PartmbB is specialized in G03. Here you find a list of all patent agent firms which are specialized in this IPC class. For a similar patent, they might be a good choice.
- 23.05.2003 - Priority Date (JP 20030146424)
- 31.12.2014 - Publication A1 (EP2818929)