Priority Date: 25.07.13 (EP 20130178066)

Method for charged-particle multi-beam exposure

  • Application ID: EP14177851
  • Status: NO OPPOSITION FILED WITHIN TIMELIMIT

Attorney

Employment test 11 - 50 employees
Company dna matschnig and forsthuber
operating since 1983
Headquarter in Vienna
active in Legal Services, IP Consulting, IP Portfolio Processing, and IP-related Communication Service

Specialization

This EP application has the IPC class H01 (BASIC ELECTRIC ELEMENTS). Here you find a list of all patent agent firms which are specialized in this IPC class. For a similar patent, they might be a good choice.

Timeline

  • 25.07.2013 - Priority Date (EP 20130178066)
  • 28.01.2015 - Publication A1 (EP2830083)
  • 04.05.2016 - Publication B1 (EP2830083)

IPC Classification