Priority Date: 18.07.07 (JP 20070187649)

Measurement method, stage apparatus, and exposure apparatus

  • Application ID: EP14175755
  • Status: NO OPPOSITION FILED WITHIN TIMELIMIT

Applicant

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Technology Company

Attorney

Employment test 51 - 200 employees
Company dna hoffmann eitle
operating since 1892
Headquarter in Munich and 4 offices
active in Legal Services and IP Portfolio Processing

Specialization

This patent has the IPC class G03 (PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY) Hoffmann Eitle PartmbB is specialized in G03. Here you find a list of all patent agent firms which are specialized in this IPC class. For a similar patent, they might be a good choice.

Timeline

  • 18.07.2007 - Priority Date (JP 20070187649)
  • 31.12.2014 - Publication A2 (EP2818927)
  • 11.03.2015 - Publication A3 (EP2818927)
  • 27.04.2016 - Publication B1 (EP2818927)

IPC Classification