Exposure apparatus, liquid removing method, and device manufacturing method
- Application ID: EP14175406
- Status: █ PATENT GRANTED
This EP application has the IPC class G03 (PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY). Hoffmann Eitle PartmbB is specialized in G03. Here you find a list of all patent agent firms which are specialized in this IPC class. For a similar patent, they might be a good choice.
- 29.08.2003 - Priority Date (JP 20030307771)
- 24.12.2014 - Publication A1 (EP2816410)
- 17.08.2016 - Publication B1 (EP2816410)