Chemical mechanical polishing slurry compositions and method using the same for copper and through-silicon via applications
- Application ID: EP14174709
- Status: █ PATENT GRANTED
This EP application has the IPC combination C09 (DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR) and H01 (BASIC ELECTRIC ELEMENTS). Beck Greener is specialized in the combination C09 and H01. We found, that Patentanwälte Rauschenbach, Engel Patentanwaltskanzlei, Hoffmann Eitle PartmbB, Ter Meer Steinmeister & Partner PartGmbB, Abrema Agence Brevets & Marques and 29 others are specialized in all of these IPC classes as well. For a similar patent, they might be a good choice.