Priority Date: 26.02.04 (US 20040547839P)

In-situ dry clean chamber for front end of line fabrication

  • Application ID: EP14172189
  • Status: APPLICATION DEEMED TO BE WITHDRAWN

Applicant

Technology company logo small
Technology Company

Attorney

Employment test 51 - 200 employees
Company dna boult wade tennant ltd
operating since 1894
Headquarter in London and 5 offices
active in Legal Services, IP Consulting, and IP Portfolio Processing

Specialization

This EP application has the IPC combination C23 (COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL) and H01 (BASIC ELECTRIC ELEMENTS). We found, that Kailuweit & Uhlemann, Riechelmann & Carlsohn GbR, Patentanwälte Rauschenbach, Bird Goën & Co NV, Troesch Scheidegger Werner AG and 25 others are specialized in this combination either. For a similar patent, they might be a good choice.

Timeline

  • 26.02.2004 - Priority Date (US 20040547839P)
  • 08.10.2014 - Publication A2 (EP2787099)
  • 03.12.2014 - Publication A3 (EP2787099)