Priority Date: 10.06.13 (US 201313914312)

Electron beam-induced etching

  • Application ID: EP14171293
  • Status: EXAMINATION REQUESTED

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Specialization

This patent has the IPC class H01 (BASIC ELECTRIC ELEMENTS) is specialized in H01. Here you find a list of all patent agent firms which are specialized in this IPC class. For a similar patent, they might be a good choice.

Timeline

  • 10.06.2013 - Priority Date (US 201313914312)
  • 17.12.2014 - Publication A2 (EP2814050)
  • 25.02.2015 - Publication A3 (EP2814050)

IPC Classification