Priority Date: 15.05.13 (JP 20130103301)

Scanning charged particle microscope, image acquisition method, and electron detection method

  • Application ID: EP14168549
  • Status: PATENT GRANTED

Applicant

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Specialization

This patent has the IPC class H01 (BASIC ELECTRIC ELEMENTS) is specialized in H01. Here you find a list of all patent agent firms which are specialized in this IPC class. For a similar patent, they might be a good choice.

Timeline

  • 15.05.2013 - Priority Date (JP 20130103301)
  • 19.11.2014 - Publication A2 (EP2804199)
  • 22.04.2015 - Publication A3 (EP2804199)
  • 14.12.2016 - Publication B1 (EP2804199)

IPC Classification