Exposure apparatus and device fabricating method
- Application ID: EP14163834
- Status: █ GRANT OF PATENT INTENDED
This EP application has the IPC class G03 (PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY). Hoffmann Eitle PartmbB is specialized in G03. Here you find a list of all patent agent firms which are specialized in this IPC class. For a similar patent, they might be a good choice.
- 29.08.2003 - Priority Date (JP 20030307025)
- 19.11.2014 - Publication A1 (EP2804048)