Priority Date: 18.03.13 (JP 20130054567)

Substrate processing device and substrate processing method

  • Application ID: EP14160175
  • Status: PATENT GRANTED

Attorney

Employment test 1 - 10 employees
Company dna twelmeier mommer and partner
no operation time available
Headquarter in Pforzheim
active in Legal Services

Specialization

This EP application has the IPC class H01 (BASIC ELECTRIC ELEMENTS). Twelmeier Mommer & Partner is specialized in H01. Here you find a list of all patent agent firms which are specialized in this IPC class. For a similar patent, they might be a good choice.

Timeline

  • 18.03.2013 - Priority Date (JP 20130054567)
  • 24.09.2014 - Publication A2 (EP2782128)
  • 22.10.2014 - Publication A3 (EP2782128)
  • 11.01.2017 - Publication B1 (EP2782128)

IPC Classification