Priority Date: 22.11.13 (EP 20130194135)

Illumination system of a microlithographic projection exposure apparatus

  • Application ID: EP14155685
  • Status: The patent has been granted

Applicant

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Technology Company

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Specialization

This EP application has the IPC class G02 (OPTICS) and G03 (PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY). We found, that Hoffmann Eitle PartmbB, Klunker Schmitt-Nilson Hirsch Patentanwälte (KSNH) Klunker IP Patentanwälte PartG mbB, Bird Goën & Co NV, Bonsmann Bonsmann Frank, Zeuner Summerer Stütz and 10 others are specialized in this combination either. For a similar patent, they might be a good choice.

Timeline

  • 22.11.2013 - Priority Date (EP 20130194135)
  • 27.05.2015 - Publication A1 (EP2876498)
  • 24.05.2017 - Publication B1 (EP2876498)

IPC Classification