Priority Date: 22.11.13 (EP 20130194135)

Illumination system of a microlithographic projection exposure apparatus

  • Application ID: EP14155685
  • Status: GRANT OF PATENT INTENDED

Applicant

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Technology Company

Attorneys

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Specialization

This patent has the IPC combination G02 (OPTICS) and G03 (PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY) is specialized in the combination G02 and G03. We found, that Hoffmann Eitle PartmbB, Bird Go├źn & Co NV, Becker Kurig Straus, Beckord & Niedlich, Bonsmann Bonsmann Frank and 11 others are specialized in all of these IPC classes. For a similar patent, they might be a good choice.

Timeline

  • 22.11.2013 - Priority Date (EP 20130194135)
  • 27.05.2015 - Publication A1 (EP2876498)

IPC Classification