Illumination system of a microlithographic projection exposure apparatus
- Application ID: EP14155685
- Status: █ The patent has been granted
This EP application has the IPC class G02 (OPTICS) and G03 (PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY). We found, that Hoffmann Eitle PartmbB, Klunker Schmitt-Nilson Hirsch Patentanwälte (KSNH) Klunker IP Patentanwälte PartG mbB, Bird Goën & Co NV, Bonsmann Bonsmann Frank, Zeuner Summerer Stütz and 10 others are specialized in this combination either. For a similar patent, they might be a good choice.