Priority Date: 22.11.13 (EP 20130194135)

Illumination system of a microlithographic projection exposure apparatus

  • Application ID: EP14155685
  • Status: The patent has been granted


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This EP application has the IPC combination G02 (OPTICS) and G03 (PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY). We found, that Hoffmann Eitle PartmbB, Klunker Schmitt-Nilson Hirsch Patentanwälte (KSNH) Klunker IP Patentanwälte PartG mbB, Plougmann & Vingtoft A/S, Bonsmann Bonsmann Frank, Werner & ten Brink and 8 others are specialized in this combination either. For a similar patent, they might be a good choice.


  • 22.11.2013 - Priority Date (EP 20130194135)
  • 27.05.2015 - Publication A1 (EP2876498)
  • 24.05.2017 - Publication B1 (EP2876498)

IPC Classification