PZT-based ferroelectric thin film-forming composition, method of preparing the same, and method of forming PZT-based ferroelectric thin film using the same
- Application ID: EP14155517
- Status: █ PATENT GRANTED
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- 25.03.2013 - Priority Date (JP 20130061938)
- 01.10.2014 - Publication A1 (EP2784137)
- 21.09.2016 - Publication B1 (EP2784137)