PZT-based ferroelectric thin film-forming composition, method of preparing the same, and method of forming PZT-based ferroelectric thin film using the same
- Application ID: EP14155207
- Status: █ PATENT GRANTED
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- 27.03.2013 - Priority Date (JP 20130066421)
- 01.10.2014 - Publication A1 (EP2784136)
- 20.07.2016 - Publication B1 (EP2784136)