Computer-readable storage medium, generating method, generating apparatus, driving apparatus, processing apparatus, lithography apparatus, and method of manufacturing article
- Application ID: EP14003575
- Status: █ PATENT GRANTED
This EP application has the IPC class G03 (PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY). Here you find a list of all patent agent firms which are specialized in this IPC class. For a similar patent, they might be a good choice.
- 31.10.2013 - Priority Date (JP 20130227536)
- 06.05.2015 - Publication A1 (EP2869121)
- 21.09.2016 - Publication B1 (EP2869121)