Composition for forming a coating type BPSG film, substrate formed a film by said composition, and patterning process using said composition
- Application ID: EP14002107
- Status: █ EXAMINATION REQUESTED
This patent has the IPC combination C08, C09, G03, and H01 is specialized in the combination C08, C09, G03, and H01. We found, that Hoffmann Eitle PartmbB, Wilhelms Kilian & Partner Patentanwälte, Dres. Fitzner Rechts- und Patentanwälte are specialized in all of these IPC classes. For a similar patent, they might be a good choice.