Composition for forming a coating type BPSG film, substrate formed a film by said composition, and patterning process using said composition
- Application ID: EP14002107
- Status: █ EXAMINATION REQUESTED
This EP application has the IPC class C08, C09, G03, and H01. We found, that Hoffmann Eitle PartmbB, Weser & Kollegen, Patentanwälte Gierlich & Pischitzis Partnerschaft, Wilhelms Kilian & Partner Patentanwälte, Dres. Fitzner Rechts- und Patentanwälte are specialized in this combination either. For a similar patent, they might be a good choice.