Priority Date: 31.05.13 (JP 20130116250)

Dry etching method, dry etching apparatus, metal film, and device including the metal film

  • Application ID: EP14001853


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operating since 1876
Headquarter in Hamburg and 2 offices
active in Legal Services and IP Consulting
Employment test 11 - 50 employees
Company dna von kreisler selting werner
operating since 1947
Headquarter in Cologne and 1 office
active in Legal Services and IP Portfolio Processing
Employment test 1 - 10 employees
Company dna hossle patentanwalte
operating since 1963
Headquarter in Stuttgart
active in Legal Services


This patent has the IPC combination C23 (COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL) and H01 (BASIC ELECTRIC ELEMENTS) is specialized in the combination C23 and H01. We found, that Patentanwälte Rauschenbach, Patentanwaltskanzlei Dr. Steiniger, Bird Goën & Co NV, Troesch Scheidegger Werner AG, adares Reininger & Partner and 23 others are specialized in all of these IPC classes. For a similar patent, they might be a good choice.


  • 31.05.2013 - Priority Date (JP 20130116250)
  • 03.12.2014 - Publication A1 (EP2808423)

IPC Classification