Priority Date: 31.08.12 (US 201261696051P)

SINGLE ULTRA-PLANAR WAFER TABLE STRUCTURE FOR BOTH WAFERS AND FILM FRAMES

  • Application ID: EP13833045
  • Status: GRANT OF PATENT INTENDED

Attorney

Employment test 11 - 50 employees
Company dna grosse schumacher knauer von hirschhausen
operating since 1987
Headquarter in Munich and 3 offices
active in Legal Services

Specialization

This patent has the IPC class H01 (BASIC ELECTRIC ELEMENTS) is specialized in H01. Here you find a list of all patent agent firms which are specialized in this IPC class. For a similar patent, they might be a good choice.

Timeline

  • 31.08.2012 - Priority Date (US 201261696051P)
  • 06.03.2014 - Publication A1 (WO2014035346)
  • 08.07.2015 - Publication A1 (EP2891175)

IPC Classification