MEMS CHIP AND MANUFACTURING METHOD THEREFOR
- Application ID: EP13813814
- Status: █ GRANT OF PATENT INTENDED
This patent has the IPC combination B81 (MICRO-STRUCTURAL TECHNOLOGY) and H01 (BASIC ELECTRIC ELEMENTS) is specialized in the combination B81 and H01. We found, that Keller & Partner Patentanwälte AG, Brevalex are specialized in all of these IPC classes. For a similar patent, they might be a good choice.