METHOD FOR USING SPUTTERING TARGET AND METHOD FOR MANUFACTURING OXIDE FILM
- Application ID: EP13810525
- Status: █ APPLICATION DEEMED TO BE WITHDRAWN
This EP application has the IPC combination C23, H01, and H05. We found, that Riechelmann & Carlsohn GbR, Koepe & Partner Patentanwälte, Cremer & Cremer, Atotech Deutschland GmbH, Yeadon IP Ltd and 2 others are specialized in this combination either. For a similar patent, they might be a good choice.