Priority Date: 29.06.12 (JP 20120147928)

METHOD FOR USING SPUTTERING TARGET AND METHOD FOR MANUFACTURING OXIDE FILM

  • Application ID: EP13810525
  • Status: APPLICATION DEEMED TO BE WITHDRAWN

Attorney

Employment test 201 - 500 employees
Company dna grunecker kinkeldey stockmair and schwanhausser
operating since 1924
Headquarter in Munich and 2 offices
active in Legal Services

Specialization

This EP application has the IPC combination C23, H01, and H05. We found, that Riechelmann & Carlsohn GbR, Koepe & Partner Patentanwälte, Cremer & Cremer, Atotech Deutschland GmbH, Yeadon IP Ltd and 2 others are specialized in this combination either. For a similar patent, they might be a good choice.

Timeline

  • 29.06.2012 - Priority Date (JP 20120147928)
  • 03.01.2014 - Publication A1 (WO2014002916)
  • 06.05.2015 - Publication A1 (EP2867387)