Priority Date: 18.06.12 (US 201261661016P)

PLASMA-ASSISTED ATOMIC LAYER EPITAXY OF CUBIC AND HEXAGONAL INN FILMS AND ITS ALLOYS WITH AIN AT LOW TEMPERATURES

  • Application ID: EP13806353
  • Status: EXAMINATION IN PROGRESS

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Specialization

This patent has the IPC class H01 (BASIC ELECTRIC ELEMENTS) is specialized in H01. Here you find a list of all patent agent firms which are specialized in this IPC class. For a similar patent, they might be a good choice.

Timeline

  • 18.06.2012 - Priority Date (US 201261661016P)
  • 27.12.2013 - Publication A1 (WO2013192001)
  • 22.04.2015 - Publication A1 (EP2862199)

IPC Classification