APPARATUS AND METHODS FOR INSPECTING EXTREME ULTRA VIOLET RETICLES
- Application ID: EP13803745
- Status: █ PATENT GRANTED
This EP application has the IPC class G03 (PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY) and H01 (BASIC ELECTRIC ELEMENTS). There is no patent agent firm in the market, which is specialized in this combination of IPC classes.