Priority Date: 14.06.12 (US 201261659804P)

APPARATUS AND METHODS FOR INSPECTING EXTREME ULTRA VIOLET RETICLES

  • Application ID: EP13803745
  • Status: PATENT GRANTED

Applicant

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Technology Company

Attorney

operating since 1927
Headquarter in Dublin and 1 office
active in Legal Services

Specialization

This EP application has the IPC class G03 (PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY) and H01 (BASIC ELECTRIC ELEMENTS). We found, that Kuhnen & Wacker, Hoffmann Eitle PartmbB, Klunker Schmitt-Nilson Hirsch Patentanwälte (KSNH) Klunker IP Patentanwälte PartG mbB, Bird Goën & Co NV, Becker Kurig Straus and 13 others are specialized in this combination either. For a similar patent, they might be a good choice.

Timeline

  • 14.06.2012 - Priority Date (US 201261659804P)
  • 19.12.2013 - Publication A1 (WO2013188232)
  • 22.04.2015 - Publication A1 (EP2862197)
  • 10.05.2017 - Publication B1 (EP2862197)

IPC Classification