METHOD FOR DRY-CLEANING METAL FILM IN FILM-FORMATION APPARATUS
- Application ID: EP13764235
- Status: █ PATENT GRANTED
This EP application has the IPC class C23 (COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL). Here you find a list of all patent agent firms which are specialized in this IPC class. For a similar patent, they might be a good choice.