USING REFLECTED AND TRANSMISSION MAPS TO DETECT RETICLE DEGRADATION
- Application ID: EP13763512
- Status: █ GRANT OF PATENT INTENDED
This EP application has the IPC combination G01 (MEASURING; TESTING) and H01 (BASIC ELECTRIC ELEMENTS). F. R. Kelly & Co. is specialized in the combination G01 and H01. We found, that TransMIT GmbH, Kailuweit & Uhlemann, Müller Hoffmann & Partner, Patentanwälte Rauschenbach, Patentanwaltskanzlei Dr. Steiniger and 116 others are specialized in all of these IPC classes as well. For a similar patent, they might be a good choice.