Priority Date: 21.08.12 (FR 20120057906)

DEVICE AND METHOD FOR MAKING DIMENSIONAL MEASUREMENTS ON MULTILAYER OBJECTS SUCH AS WAFERS

  • Application ID: EP13759989
  • Status: GRANT OF PATENT INTENDED

Attorney

Company dna pontet allano and associes
no operation time available
2 offices
active in Legal Services

Specialization

This EP application has the IPC class B24, G01, and H01. There is no patent agent firm in the market, which is specialized in this combination of IPC classes.

Timeline

  • 21.08.2012 - Priority Date (FR 20120057906)
  • 27.02.2014 - Publication A1 (WO2014029703)
  • 01.07.2015 - Publication A1 (EP2888551)