Priority Date: 21.08.12 (FR 20120057906)

DEVICE AND METHOD FOR MAKING DIMENSIONAL MEASUREMENTS ON MULTILAYER OBJECTS SUCH AS WAFERS

  • Application ID: EP13759989
  • Status: GRANT OF PATENT INTENDED

Attorney

Company dna pontet allano and associes
no operation time available
2 offices
active in Legal Services

Specialization

This patent has the IPC combination B24, G01, and H01 is specialized in the combination B24, G01, and H01. We found, that Nash Matthews LLP, Chapman IP are specialized in all of these IPC classes. For a similar patent, they might be a good choice.

Timeline

  • 21.08.2012 - Priority Date (FR 20120057906)
  • 27.02.2014 - Publication A1 (WO2014029703)
  • 01.07.2015 - Publication A1 (EP2888551)