Priority Date: 21.08.12 (FR 20120057906)

DEVICE AND METHOD FOR MAKING DIMENSIONAL MEASUREMENTS ON MULTILAYER OBJECTS SUCH AS WAFERS

  • Application ID: EP13759989
  • Status: GRANT OF PATENT INTENDED

Attorney

Company dna pontet allano and associes
no operation time available
5 offices
active in Legal Services

Specialization

This EP application has the IPC combination B24, G01, and H01. We found, that Durm & Partner is specialized in this combination either. For a similar patent, they might be a good choice.

Timeline

  • 21.08.2012 - Priority Date (FR 20120057906)
  • 27.02.2014 - Publication A1 (WO2014029703)
  • 01.07.2015 - Publication A1 (EP2888551)