WAFER AND RETICLE INSPECTION SYSTEMS AND METHOD FOR SELECTING ILLUMINATION PUPIL CONFIGURATIONS
- Application ID: EP13757677
- Status: █ GRANT OF PATENT INTENDED
This EP application has the IPC class G01 (MEASURING; TESTING) and H01 (BASIC ELECTRIC ELEMENTS). F. R. Kelly & Co. is specialized in the combination G01 and H01. We found, that TransMIT GmbH, Kailuweit & Uhlemann, Müller Hoffmann & Partner, Patentanwälte Rauschenbach, Patentanwaltskanzlei Dr. Steiniger and 112 others are specialized in all of these IPC classes as well. For a similar patent, they might be a good choice.