Priority Date: 07.03.12 (US 201261607588P)

WAFER AND RETICLE INSPECTION SYSTEMS AND METHOD FOR SELECTING ILLUMINATION PUPIL CONFIGURATIONS

  • Application ID: EP13757677
  • Status: GRANT OF PATENT INTENDED

Applicant

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Technology Company

Attorney

operating since 1927
Headquarter in Dublin and 1 office
active in Legal Services

Specialization

This patent has the IPC combination G01 (MEASURING; TESTING) and H01 (BASIC ELECTRIC ELEMENTS) F. R. Kelly & Co. is specialized in the combination G01 and H01. We found, that Coller IP Management Ltd, TransMIT GmbH, Müller Hoffmann & Partner, Patentanwälte Rauschenbach, Patentanwaltskanzlei Dr. Steiniger and 118 others are specialized in all of these IPC classes as well. For a similar patent, they might be a good choice.

Timeline

  • 07.03.2012 - Priority Date (US 201261607588P)
  • 12.09.2013 - Publication A1 (WO2013134068)
  • 14.01.2015 - Publication A1 (EP2823288)

IPC Classification