Priority Date: 01.08.12 (DE 201210213515)

METHOD FOR OPERATING A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS

  • Application ID: EP13753085
  • Status: GRANT OF PATENT INTENDED

Applicant

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Attorney

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Specialization

This EP application has the IPC class G02 (OPTICS) and G03 (PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY). We found, that Hoffmann Eitle PartmbB, Klunker Schmitt-Nilson Hirsch Patentanwälte (KSNH) Klunker IP Patentanwälte PartG mbB, Plougmann & Vingtoft A/S, Bird Goën & Co NV, Beckord & Niedlich and 10 others are specialized in this combination either. For a similar patent, they might be a good choice.

Timeline

  • 01.08.2012 - Priority Date (DE 201210213515)
  • 06.02.2014 - Publication A1 (WO2014019675)
  • 10.06.2015 - Publication A1 (EP2880495)

IPC Classification