Priority Date: 08.08.12 (DE 201210214063)

ILLUMINATION SYSTEM FOR AN EUV PROJECTION LITHOGRAPHIC PROJECTION EXPOSURE APPARATUS

  • Application ID: EP13750012
  • Status: GRANT OF PATENT INTENDED

Applicant

Technology company logo small
Technology Company

Attorney

Employment test 11 - 50 employees
Company dna rau schneck and huebner
operating since 1878
Headquarter in Nuremberg, Berlin and 1 office
active in Legal Services and IP Consulting

Specialization

This patent has the IPC combination G03, H01, and H05 is specialized in the combination G03, H01, and H05. We found, that Global IP Europe Patentanwaltskanzlei, Lam Research AG are specialized in all of these IPC classes. For a similar patent, they might be a good choice.

Timeline

  • 08.08.2012 - Priority Date (DE 201210214063)
  • 13.02.2014 - Publication A1 (WO2014023660)
  • 17.06.2015 - Publication A1 (EP2883112)

IPC Classification