Priority Date: 08.08.12 (FR 20120057711)

SUBSTRATE FOR HIGH-RESOLUTION ELECTRONIC LITHOGRAPHY AND CORRESPONDING LITHOGRAPHY METHOD

  • Application ID: EP13745079
  • Status: NO OPPOSITION FILED WITHIN TIMELIMIT

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Specialization

This patent has the IPC class G03 (PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY) is specialized in G03. Here you find a list of all patent agent firms which are specialized in this IPC class. For a similar patent, they might be a good choice.

Timeline

  • 08.08.2012 - Priority Date (FR 20120057711)
  • 13.02.2014 - Publication A1 (WO2014023665)
  • 17.06.2015 - Publication A1 (EP2883110)
  • 25.05.2016 - Publication B1 (EP2883110)

IPC Classification