Priority Date: 18.07.12 (FR 20120056948)

METHOD FOR MANUFACTURING A THIN FILM OF ORDERED SILICON NANOPATTERNS

  • Application ID: EP13744763
  • Status: GRANT OF PATENT INTENDED

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Specialization

This patent has the IPC combination B81, B82, and H01 is specialized in the combination B81, B82, and H01. There is no patent agent firm in the market, which is specialized in this combination of IPC classes.

Timeline

  • 18.07.2012 - Priority Date (FR 20120056948)
  • 23.01.2014 - Publication A1 (WO2014013193)
  • 27.05.2015 - Publication A1 (EP2875522)

IPC Classification