Priority Date: 04.07.12 (NL 20121039714)

INTEGRATED LIGHT OPTICAL AND CHARGED PARTICLE BEAM INSPECTION APPARATUS

  • Application ID: EP13739852
  • Status: PATENT GRANTED

Attorney

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Headquarter in The Hague and 1 office
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Specialization

This EP application has the IPC combination G02 (OPTICS) and H01 (BASIC ELECTRIC ELEMENTS). We found, that TransMIT GmbH, Riechelmann & Carlsohn GbR, Viering, Jentschura & Partner mbB Patent- und Rechtsanwälte, Müller Hoffmann & Partner, Engel Patentanwaltskanzlei and 53 others are specialized in this combination either. For a similar patent, they might be a good choice.

Timeline

  • 04.07.2012 - Priority Date (NL 20121039714)
  • 09.01.2014 - Publication A1 (WO2014007624)
  • 13.05.2015 - Publication A1 (EP2870497)
  • 19.10.2016 - Publication B1 (EP2870497)

IPC Classification