Priority Date: 19.01.12 (US 201261588601P)

MATERIALS, COMPONENTS, AND METHODS FOR USE WITH EXTREME ULTRAVIOLET RADIATION IN LITHOGRAPHY AND OTHER APPLICATIONS

  • Application ID: EP13738584
  • Status: GRANT OF PATENT INTENDED

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Specialization

This patent has the IPC class G03 (PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY) is specialized in G03. Here you find a list of all patent agent firms which are specialized in this IPC class. For a similar patent, they might be a good choice.

Timeline

  • 19.01.2012 - Priority Date (US 201261588601P)
  • 25.07.2013 - Publication A1 (WO2013109986)
  • 03.12.2014 - Publication A1 (EP2807522)

IPC Classification